ESPRIT '88: Putting the Technology to Use : Proceedings of the 5th Annual ESPRIT Conference, Brussels, November 14-17, 1988, Part 1

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North-Holland, 1988 - 1759 pages
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Part1. Advanced microelectronics. VLSI technologies - comparisons and prospects. Software technology. Advanced information processing. Part2. Office systems.Computer integrated manufacturing. Information exchange system.

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Page 113
Epi substrate p/p-H th=10 pum Oxynitride deposition Photo + etch active areas
Photo well stepper projection Well implant (P + As) and drive-in Photo + field
implant BF2 LOCOS (0.7 um) Gate oxide (25 nm) Photo NMOST + double B
implant ...
Page 130
Table 2: Main features of Computer Control • Computer control based on two Intel
8086 microprocessors to process 16-bit data. • Complete automation of etch
process, wafer transport and vacuum control. - End-point detection in real time.
Page 137
574 PERFORMANCE OF AN 8" RIE ETCHING SYSTEM: THE EFFECT OF
CATHODE COWER MATERIALS P. Hoffmann, F. Heinrich, W. Pilz, H.-C. Scheer
Fraunhofer Institut fuer Mikrostrukturtechnik, IMT, Berlin, FRG I. Hussla Leybold
AG, ...

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Contents

Technology Transfer from Research to Development Project 97 Pype P Van Meerbergen J De Man
5
Materials and Devices Toward ThreeDimensional Integration Project 245 Cahill C G Dunne B OFlanagan S Hobbs L Mathewson A
21
Physical ºquivalentCircuit Models for GaAs Mesſets Project 255 Ghione G Naldi C Pettenpaul E Ponse F
52
Copyright

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ESPRIT '88: Putting the Technology to Use : Proceedings of the 5th ..., Part 2
Commission of the European Communities. Directorate-General for Telecommunications, Information Industries, and Innovation
Snippet view - 1988

Common terms and phrases

abstract abstract machine algorithm allows analysis Aphrodite application approach architecture Artificial Intelligence basic behaviour BFNEW BICMOS cell chip circuit CMOS complex components Computer concepts constraints DAIDA database defined definition described devices distributed domain dynamic environment error Esprit Project etch evaluation example execution expert systems Figure function GaAs gate global goal graphical GRASPIN IEEE implementation information system input integrated interaction interpreter knowledge base knowledge representation language layer LFSR logic programming machine mapping MESFET metaclass method methodology migration module node object-oriented objects operations output parallel parameters partial evaluation PCTE performance phase PIMS possible predicates problem procedure processor programming language project management Prolog Prolog III prototype query representation requirements rules semantic signal simulation specification structure subcircuit task techniques transistor transputer UNIX user interface VLSI wafer

Bibliographic information

QR code for ESPRIT '88
TitleESPRIT '88: Putting the Technology to Use : Proceedings of the 5th Annual ESPRIT Conference, Brussels, November 14-17, 1988, Part 1
Volume 5 of ESPRIT : annual conference : proceedings
ESPRIT '88: Putting the Technology to Use : Proceedings of the 5th Annual ESPRIT Conference, Brussels, November 14-17, 1988, Commission of the European Communities. Directorate-General for Telecommunications, Information Industries, and Innovation
Volume 11852 of EUR (Brussels), ISSN 0303-755X
Volume 11852 of EUR (Series)
Publication no. EUR 11852 of the Commission of the European Communities, Directorate-General Telecommunications, Information Industries, and Innovation, Luxembourg
AuthorCommission of the European Communities. Directorate-General for Telecommunications, Information Industries, and Innovation
PublisherNorth-Holland, 1988
Original fromthe University of California
Digitized6 Nov 2009
ISBN0444871454, 9780444871459
Length1759 pages
  
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