ESPRIT '88: Putting the Technology to Use : Proceedings of the 5th Annual ESPRIT Conference, Brussels, November 14-17, 1988, Part 1North-Holland, 1988 - 1759 pages Part1. Advanced microelectronics. VLSI technologies - comparisons and prospects. Software technology. Advanced information processing. Part2. Office systems.Computer integrated manufacturing. Information exchange system. |
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Page 128
... Wafer Etching As wafer sizes increase and the value of each wafer increases accordingly , equipment manufacture has shifted away from batch type reactors towards single wafer etch ( SWE ) machines [ 3 ] . Each chamber of the MPE 3003 ...
... Wafer Etching As wafer sizes increase and the value of each wafer increases accordingly , equipment manufacture has shifted away from batch type reactors towards single wafer etch ( SWE ) machines [ 3 ] . Each chamber of the MPE 3003 ...
Page 129
... wafer breakage detection device [ 5 ] . 2.3.4 Particle Management Effective particle control becomes more and more ... wafer transfer . Base pressure gradients to confine plasma - generated particles to the source chamber : 1 ) 2 ) 3 ) 4 ...
... wafer breakage detection device [ 5 ] . 2.3.4 Particle Management Effective particle control becomes more and more ... wafer transfer . Base pressure gradients to confine plasma - generated particles to the source chamber : 1 ) 2 ) 3 ) 4 ...
Page 165
... wafer will be attached with an epoxy glue into an AlN substrate with 2 le- vels interconnection for power and ground ... wafer . The building block used is the ST 41H87 ( 64 kwork x 1 bit ) . The first design of the wafer scale memory is ...
... wafer will be attached with an epoxy glue into an AlN substrate with 2 le- vels interconnection for power and ground ... wafer . The building block used is the ST 41H87 ( 64 kwork x 1 bit ) . The first design of the wafer scale memory is ...
Contents
A Technology Transfer from Research to Development Project | 3 |
BitRate Reduction of High Quality Audio Signals Using FloatingPoint | 13 |
Materials and Devices Toward ThreeDimensional Integration Project 245 | 22 |
Copyright | |
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Common terms and phrases
abstract algorithm allows analysis Aphrodite application approach architecture array basic behaviour BICMOS cell chip circuit CMOS communication complex components Computer concepts constraints database debugging defined demonstrator described devices distributed domain dynamic efficient environment error Esprit Project etching evaluation example execution expert systems Figure function GaAs gate GEODE global goal graphical IEEE implementation inference engine input integrated integrated circuits interaction interpreter kernel knowledge base knowledge representation layer LFSR logic programming machine mechanism memory MESFET method methodology module node object-oriented objects operations optimization output parallel parameters partial evaluation PCTE performance phase possible predicates problem Proc procedure processor Prolog Prolog III prototype query relations representation requirements rule semantic sequence signal simulation specific structure subcircuit SUPERNODE task techniques transistor transputer tuple UNIX VLSI wafer